Ecosyste.ms: Papers
An open API service providing mapping between scientific papers and software projects that are mentioned in them.
All mentions data is based on the CZI Software Mentions dataset.
Papers: 10.6028/jres.098.032
https://doi.org/10.6028/jres.098.032
X-ray-lithography mask metrology: Use of transmitted electrons in an SEM for linewidth measurement
Cited by: 21
Author(s): Michael T. Postek, Jeremiah R. Lowney, András Vladár, William J. Keery, Egon Marx, Robert D. Larrabee
Published: over 31 years ago
Software Mentions 1
cran: Spectrum
Fast Adaptive Spectral Clustering for Single and Multi-View DataPapers that mentioned: 450