Papers: 10.3390/s20030618

https://doi.org/10.3390/s20030618

In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection

Cited by: 14
Author(s): Andi Setiono, Maik Bertke, Wilson Ombati Nyang’au, Jiushuai Xu, Michael Fahrbach, I. Kirsch, Erik Uhde, A. Deutschinger, E.J. Fantner, Christian H. Schwalb, Hutomo Suryo Wasisto, Erwin Peiner
Published: over 6 years ago

Software Mentions 1