Papers: 10.3390/s19092073

https://doi.org/10.3390/s19092073

Proximity Gettering Design of Hydrocarbon–Molecular–Ion–Implanted Silicon Wafers Using Dark Current Spectroscopy for CMOS Image Sensors

Cited by: 17
Author(s): Kazunari Kurita, Takeshi Kadono, Satoshi Shigematsu, Ryo Hirose, Ryosuke Okuyama, Ayumi Onaka‐Masada, Hiroyuki Okuda, Yoshio Koga
Published: over 7 years ago

Software Mentions 1