Papers: 10.3390/s18072157

https://doi.org/10.3390/s18072157

Analysis of Frequency Stability and Thermoelastic Effects for Slotted Tuning Fork MEMS Resonators

Cited by: 20
Author(s): Valentina Zega, Attilio Frangi, Andrea Guercilena, Gabriele Gattere
Published: about 8 years ago

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