Papers: 10.1038/s41598-020-80880-3

https://doi.org/10.1038/s41598-020-80880-3

Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices

Cited by: 23
Author(s): Nguyễn Văn Toàn, Truong Thi Kim Tuoi, Naoki Inomata, Masaya Toda, Takahito Ono
Published: almost 6 years ago

Software Mentions 1