Ecosyste.ms: Papers
An open API service providing mapping between scientific papers and software projects that are mentioned in them.
All mentions data is based on the CZI Software Mentions dataset.
Papers: 10.1038/s41598-020-79560-z
https://doi.org/10.1038/s41598-020-79560-z
Mechanism understanding in cryo atomic layer etching of SiO2 based upon C4F8 physisorption
Cited by: 9
Author(s): Gaëlle Antoun, Thomas Tillocher, Philippe Lefaucheux, Jacques Faguet, Kaoru Maekawa, Rémi Dussart
Published: almost 4 years ago